Optical Coherence Tomography Imaging by a Fully Integrated MOEMS Endomicroscopy Probe With Mirau Microinterferometer and Two-Axis Electrothermal Microscanner Using Lissajous Trajectory Scanning
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24_IEEE_Struk_MEMS.pdf (6.91 MB)
0000-0003-1727-2523 Date
2024-05-01
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IEEE Council
Abstract
Abstract—This article presents the results of a study focused on the development of an integrated probe intended for endomicroscopic application. A new type of transverse scanning probe is described, which was built using Mirau microinterferometer fabricated in microopto- electromechanical systems (MOEMS) technology, and a two-axis electrothermal actuator fabricated in micro-electromechanical systems (MEMS) technology, connected with a gradient-index (GRIN) lens collimator and single-mode fiber. Herein, we present a numerical analysis and an optimization of endomicroscopic probe-scanning properties, based on Lissajous curves. The key part of this article is 2-D and 3-D imaging of phantom structures, based on polymer material, light-scattering material, and USAF-target pattern visualized with an endomicroscopy probe. The imaging was obtained by the swept source optical coherence tomography (SS-OCT) technique, working at a central wavelength λc = 1060 nm, a swept range 1λ = 100 nm, an A-scan rate fa = 200 kHz, and the scanning of samples with the use of Lissajous curves.
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P. Struk et al., "Optical Coherence Tomography Imaging by a Fully Integrated MOEMS Endomicroscopy Probe With Mirau Microinterferometer and Two-Axis Electrothermal Microscanner Using Lissajous Trajectory Scanning," in IEEE Sensors Journal, vol. 24, no. 9, pp. 13903-13913, 1 May, 2024, doi: 10.1109/JSEN.2024.3373223